====== RedHawk Tech File ======
===== Generate Tehc File for RedHawk =====
==== from Synopsys StarRC Tech File ====
Using redhawk utilty //rhtehc// to generate tech file from STARRC-XT file
204:zx211100@shaltc02:design_data >> rhtech
#############################################################
# #
# Copyright (C) 2001-2010 Apache Design Solutions, Inc. #
# rhtech: RedHawk Technology Translator #
# version: 10.1 #
# #
#############################################################
Usage: rhtech -i [-o ] [-m ] [-e ] [-t ]
-i : required technology input *.itf or *.nxtgrd file
[-o output_file] : optional output file; default is '.tech'
[-e ] : optional EM rule file; default is '1.0'
Example: metal1 []
[-ae ] : optional apollo em value from maxCurrDensity
[-t ] : optional temperature coefficients file
Example: metal1 25 125 2 5
[-m ] : optional layer mapping file
[-g captab] : generate tech file with cap table attached
Example: conducting_layers
POLY poly
via_layers
VIA1 via1
remove_layers
TEXT
==== from Cadence Tech File ====
Using Script adsTechConverter.pl for Cadence Tech File.
===== RedHawk Tech File Example =====
# Apache Redhawk Technology File
units {
capacitance 1p
inductance 1n
resistance 1
length 1u
current 1m
voltage 1
power 1
time 1n
frequency 1me
}
metal METAL8
{
Thickness 1.45
T 110
Tnom 25
Coeff_RT1 3.89
Coeff_RT2 -1.5e-07
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 2.0000 4.0000 6.0000 8.0000 }
WIDTHS { 3.0000 6.0000 9.0000 12.0000 15.0000 }
VALUES {
{ 0.0323 0.0323 0.0323 0.0323 }
{ 0.0323 0.0323 0.0323 0.0323 }
{ 0.0323 0.0323 0.0323 0.0323 }
{ 0.0323 0.0323 0.0323 0.0323 }
{ 0.0323 0.0323 0.0323 0.0323 }
}
}
EM 2.7
above APACHE_D4
}
metal METAL7
{
Thickness 0.9
T 25
Tnom 110
Coeff_RT1 0.003625
Coeff_RT2 -1.393e-06
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.4000 0.6000 0.8000 1.0000 1.2000 1.5000 2.0000 2.5000 3.0000 3.5000 4.0000 4.5000 5.0000 5.5000 6.0000 }
WIDTHS { 0.4000 0.6000 0.8000 1.0000 1.2000 1.5000 2.0000 3.0000 4.5000 5.0000 6.0000 7.5000 9.0000 10.0000 12.0000 }
VALUES {
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 }
{ 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 }
{ 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 }
{ 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 }
{ 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 }
{ 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 }
{ 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 }
{ 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
}
}
EM 8.096
EM_ADJUST 0.02
above APACHE_C7a
}
metal METAL6
{
Thickness 0.9
T 25
Tnom 110
Coeff_RT1 0.003625
Coeff_RT2 -1.393e-06
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.4000 0.6000 0.8000 1.0000 1.2000 1.5000 2.0000 2.5000 3.0000 3.5000 4.0000 4.5000 5.0000 5.5000 6.0000 }
WIDTHS { 0.4000 0.6000 0.8000 1.0000 1.2000 1.5000 2.0000 3.0000 4.5000 5.0000 6.0000 7.5000 9.0000 10.0000 12.0000 }
VALUES {
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 }
{ 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 }
{ 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 }
{ 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 }
{ 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 }
{ 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 }
{ 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 }
{ 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
{ 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 0.0200 }
}
}
EM 8.096
EM_ADJUST 0.02
above APACHE_C6a
}
metal METAL5
{
Thickness 0.22
T 25
Tnom 110
Coeff_RT1 0.002709
Coeff_RT2 -3.483e-07
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
WIDTHS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
VALUES {
{ 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 }
{ 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 }
{ 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 }
{ 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 }
{ 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239 }
{ 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 }
{ 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 }
}
}
EM 1.877
EM_ADJUST 0.016
above APACHE_C5a
}
metal METAL4
{
Thickness 0.22
T 25
Tnom 110
Coeff_RT1 0.002709
Coeff_RT2 -3.483e-07
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
WIDTHS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
VALUES {
{ 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 }
{ 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 }
{ 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 }
{ 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 }
{ 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239 }
{ 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 }
{ 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 }
}
}
EM 1.877
EM_ADJUST 0.016
above APACHE_C4a
}
metal METAL3
{
Thickness 0.22
T 25
Tnom 110
Coeff_RT1 0.002709
Coeff_RT2 -3.483e-07
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
WIDTHS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
VALUES {
{ 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 }
{ 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 }
{ 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 }
{ 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 }
{ 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239 }
{ 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 }
{ 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 }
}
}
EM 1.877
EM_ADJUST 0.016
above APACHE_C3a
}
metal METAL2
{
Thickness 0.22
T 25
Tnom 110
Coeff_RT1 0.002709
Coeff_RT2 -3.483e-07
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
WIDTHS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
VALUES {
{ 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 }
{ 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 }
{ 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 }
{ 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 }
{ 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239 }
{ 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 }
{ 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 }
{ 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 }
{ 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 }
}
}
EM 1.877
EM_ADJUST 0.016
above APACHE_C2a
}
metal METAL1
{
Thickness 0.18
T 25
Tnom 110
Coeff_RT1 0.00265
Coeff_RT2 -2.641e-07
RHO_VS_WIDTH_AND_SPACING {
SPACINGS { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 1.5000 2.0000 2.5000 3.0000 5.0000 }
WIDTHS { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 2.0000 3.0000 4.5000 7.5000 12.0000 }
VALUES {
{ 0.0312 0.0304 0.0295 0.0278 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 }
{ 0.0297 0.0295 0.0287 0.0274 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 }
{ 0.0279 0.0279 0.0275 0.0268 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 }
{ 0.0263 0.0263 0.0263 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 }
{ 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 }
{ 0.0228 0.0228 0.0228 0.0228 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 }
{ 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 }
{ 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 }
{ 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 }
{ 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 }
}
}
EM 1.509
EM_ADJUST 0.016
above APACHE_B_B
}
METAL OVERLAP
{
Thickness 0.14
Resistance 10.51
EM 1
above APACHE_A_C
}
via OVERLAPCont
{
Width { 0.09 }
Resistance 30
EM 1
UpperLayer METAL1
LowerLayer OVERLAP
}
via VIA78
{
Width { 3 }
Resistance 0.041
T 25
Tnom 110
Coeff_RT1 0.00337
Coeff_RT2 -7.91
EM 7
UpperLayer METAL8
LowerLayer METAL7
}
via VIA67
{
Width { 0.36 }
Resistance 0.22
T 25
Tnom 110
Coeff_RT1 0.003873
Coeff_RT2 -5.471e-05
EM 3.077
UpperLayer METAL7
LowerLayer METAL6
}
via VIA56
{
Width { 0.36 }
Resistance 0.22
T 25
Tnom 110
Coeff_RT1 0.003873
Coeff_RT2 -5.471e-05
EM 3.077
UpperLayer METAL6
LowerLayer METAL5
}
via VIA45
{
Width { 0.1 }
Resistance 1.5
T 25
Tnom 110
Coeff_RT1 0.0007815
Coeff_RT2 -2.574e-06
EM 0.158
UpperLayer METAL5
LowerLayer METAL4
}
via VIA34
{
Width { 0.1 }
Resistance 1.5
T 25
Tnom 110
Coeff_RT1 0.0007815
Coeff_RT2 -2.574e-06
EM 0.158
UpperLayer METAL4
LowerLayer METAL3
}
via VIA23
{
Width { 0.1 }
Resistance 1.5
T 25
Tnom 110
Coeff_RT1 0.0007815
Coeff_RT2 -2.574e-06
EM 0.158
UpperLayer METAL3
LowerLayer METAL2
}
via VIA12
{
Width { 0.1 }
Resistance 1.5
T 25
Tnom 110
Coeff_RT1 0.0007815
Coeff_RT2 -2.574e-06
EM 0.158
UpperLayer METAL2
LowerLayer METAL1
}
dielectric APACHE_E
{
constant 3.9
thickness 1.47
Height 8.59
}
dielectric APACHE_D6
{
constant 3.9
thickness 0.6
above APACHE_D5b
}
dielectric APACHE_D5b
{
constant 3.9
thickness 0.4
above APACHE_D5a
}
dielectric APACHE_D5a
{
constant 3.9
thickness 1.45
above APACHE_D4
}
dielectric APACHE_D4
{
constant 3.9
thickness 0.25
above APACHE_D3
}
dielectric APACHE_D3
{
constant 3.9
thickness 0.075
above APACHE_D2
}
dielectric APACHE_D2
{
constant 3.9
thickness 0.4
above APACHE_D1
}
dielectric APACHE_D1
{
constant 3.9
thickness 0.075
above APACHE_C7c
}
dielectric APACHE_C7c
{
constant 3.9
thickness 0.775
above APACHE_C7b
}
dielectric APACHE_C7b
{
constant 3.9
thickness 0.05
above APACHE_C7a_A
}
dielectric APACHE_C7a_A
{
constant 3.9
thickness 0.075
above APACHE_C7a
}
dielectric APACHE_C7a
{
constant 3.9
thickness 0.545
above APACHE_C6d
}
dielectric APACHE_C6d
{
constant 3.9
thickness 0.05
above APACHE_C6c
}
dielectric APACHE_C6c
{
constant 3.9
thickness 0.775
above APACHE_C6b
}
dielectric APACHE_C6b
{
constant 3.9
thickness 0.05
above APACHE_C6a_A
}
dielectric APACHE_C6a_A
{
constant 3.9
thickness 0.075
above APACHE_C6a
}
dielectric APACHE_C6a
{
constant 3.9
thickness 0.545
above APACHE_C5c
}
dielectric APACHE_C5c
{
constant 3.9
thickness 0.05
above APACHE_C5b
}
dielectric APACHE_C5b
{
constant 3.9
thickness 0.22
above APACHE_C5a
}
dielectric APACHE_C5a
{
constant 3.9
thickness 0.095
above APACHE_C4d
}
dielectric APACHE_C4d
{
constant 3.9
thickness 0.03
above APACHE_C4c
}
dielectric APACHE_C4c
{
constant 3.9
thickness 0.05
above APACHE_C4b
}
dielectric APACHE_C4b
{
constant 3.9
thickness 0.22
above APACHE_C4a
}
dielectric APACHE_C4a
{
constant 3.9
thickness 0.095
above APACHE_C3d
}
dielectric APACHE_C3d
{
constant 3.9
thickness 0.03
above APACHE_C3c
}
dielectric APACHE_C3c
{
constant 3.9
thickness 0.05
above APACHE_C3b
}
dielectric APACHE_C3b
{
constant 3.9
thickness 0.22
above APACHE_C3a
}
dielectric APACHE_C3a
{
constant 3.9
thickness 0.095
above APACHE_C2d
}
dielectric APACHE_C2d
{
constant 3.9
thickness 0.03
above APACHE_C2c
}
dielectric APACHE_C2c
{
constant 3.9
thickness 0.05
above APACHE_C2b
}
dielectric APACHE_C2b
{
constant 3.9
thickness 0.22
above APACHE_C2a
}
dielectric APACHE_C2a
{
constant 3.9
thickness 0.095
above APACHE_C1d
}
dielectric APACHE_C1d
{
constant 3.9
thickness 0.03
above APACHE_C1c
}
dielectric APACHE_C1c
{
constant 3.9
thickness 0.05
above APACHE_C1b
}
dielectric APACHE_C1b
{
constant 3.9
thickness 0.13
above APACHE_C1a
}
dielectric APACHE_C1a
{
constant 3.9
thickness 0.03
above APACHE_B_A
}
dielectric APACHE_B_A
{
constant 3.9
thickness 0.02
above APACHE_B_B
}
dielectric APACHE_B_B
{
constant 3.9
thickness 0.17
above APACHE_B_C
}
dielectric APACHE_B_C
{
constant 3.9
thickness 0.1
above APACHE_A_A
}
dielectric APACHE_A_A
{
constant 3.9
thickness 0.02
above APACHE_A_B
}
dielectric APACHE_A_B
{
constant 3.9
thickness 0.14
above APACHE_A_C
}
dielectric APACHE_A_C
{
constant 3.9
thickness 0.16
Height 0.0
}